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微电子机械系统光滤波器
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微电子机械系统光滤波器
Encyclopedia
工学
微电子机械系统光传感器
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micro-electromechanical system optical filter
微电子机械系统光滤波器
采用微机械结构和微纳制备工艺实现的用来进行光波长选择的器件。又称微电子机械系统滤镜。
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Content Resource Integration
content review of publications
contents surveillance management
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conterminal
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