“微机械惯性传感器”的概念、定义、翻译、参考文献-科学参考

单词	微机械惯性传感器
释义	微机械惯性传感器 Encyclopedia 工学惯性导航释 micro-electro-mechanical system inertial sensor; MEMS inertial sensor微机械惯性传感器以集成电路和微机械加工工艺为基础的惯性传感器。工学〔惯性仪表〕释 micro-electromechanical system inertial sensor微机械惯性传感器集微型精密机械、微电子学、半导体集成电路工艺等技术于一身的惯性器件。又称微机电惯性仪表。
随便看	nonlinear Landau damping non linear laser spectroscopy non-linear laser spectroscopy nonlinear laser spectroscopy nonlinear lattice dynamics nonlinear least squares fitting nonlinear least squares problem non-linear load nonlinear magneto-optical Kerr effect non linear mapping non-linear mapping nonlinear mapping nonlinear master equation nonlinear material nonlinear mechanics nonlinear mechanics of multi-field coupling nonlinear medicine nonlinear medium nonlinear microlocal analysis nonlinear mode nonlinear model nonlinear modulation and demodulation non-linear molecule nonlinear motion nonlinear multi-agent system

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