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常压化学气相沉积
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常压化学气相沉积
Encyclopedia
工学
化学气相淀积工艺
释
air pressure chemical vapor deposition; APCVD
常压化学气相沉积
在压力接近常压下进行化学气相沉积(chemical vapor deposition; CVD)反应的一种沉积技术。
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