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局域表面等离子体光刻
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局域表面等离子体光刻
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工学
等离子体光刻
释
localized surface plasmonic lithography
局域表面等离子体光刻
利用局域表面等离子体谐振的光场局域和增强效应,实现超分辨纳米图形制备的等离子体光刻技术。
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