“局域表面等离子体光刻”的概念、定义、翻译、参考文献-科学参考

单词	局域表面等离子体光刻
释义	局域表面等离子体光刻 Encyclopedia 工学等离子体光刻释 localized surface plasmonic lithography局域表面等离子体光刻利用局域表面等离子体谐振的光场局域和增强效应，实现超分辨纳米图形制备的等离子体光刻技术。
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