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射频溅射
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射频溅射
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direct current sputtering
射频溅射
利用射频放电等离子体中的正离子轰击靶材,溅射出的靶材原子沉积在接地的基板表面从而形成薄膜的技术。
Physics
原子核物理学、粒子物理学
原子核物理学
radio-frequency sputtering, RF sputtering
射频溅射
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