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射频微机电系统
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射频微机电系统
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工学
微纳器件
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radio frequency MEMS; RF MEMS
射频微机电系统
运用微机电系统(micro electro-mechanical system,MEMS)技术,利于从低频直到红外以下频段信号,产生与处理的微型化和可集成的器件和系统。
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shale swelling tester
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shallow geothermal energy survey
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shallow lake subfacie
shallow land burial
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shallow level impurities
shallow level impurity
shallow level semiconductor
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shallow marine facies
shallow marine sediment geochemical survey
shallow parsing
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