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子孔径拼接
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子孔径拼接
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Sub-aperture stitching
子孔径拼接
子孔径拼接技术是用小口径高精度干涉仪检测大口径光学元件,将被测元件按照一定的规则划分为若干子孔径,使相邻子孔径之间稍有重叠,并要求子孔径能够覆盖整个被测面形,规划好检测子孔径的路径,然后分别对每个子孔径进行高精度检测,最后利用拼接算法求得重叠区域的相位值,将各个子孔径数据进行拼接,得到全口径的测量结果的技术。
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