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多功能集成微电子机械系统传感器
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多功能集成微电子机械系统传感器
Encyclopedia
工学
微电子机械系统
释
multi-function integrated micro-electromechanical system sensor
多功能集成微电子机械系统传感器
利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上,实现多参数测量的传感器。
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change of topology
change of variable of definite integral
change of variables
change of variables theorem
change-over switch
change-over system
change point
Chang'e Project
changer
change request
changes and unity
changes in atmospheric composition
changes in inventories
Changes in Late Qing Opera
Changes in Li Village
changes in productivity approach
Changes in the Village
changes of biodiversity
changes of geographical names
change-wheel garage of straddle type monorail
Chang Fa
Changfeng Park
Changfeng Xian
Chang Fuyuan
Changgang Shuiku
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