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多功能集成微电子机械系统传感器
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多功能集成微电子机械系统传感器
Encyclopedia
工学
微电子机械系统
释
multi-function integrated micro-electromechanical system sensor
多功能集成微电子机械系统传感器
利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上,实现多参数测量的传感器。
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source-reservoir pressure difference
source resistance
source restoration
source rock
source rock analysis
source rock assessment
source route
sources and uses of credit funds
source shape
sources identification of aerosol
source-sink landscape theory
source-sink relationship
source-size effect
Sources of Ancient Poems
sources of international economic law
sources of law
sources of private international law
Sources of the Self:The Making of Modern Identity
Sources of Words
source strength
source structure
source subtraction
source survey
source synchronization clocking
source synchronization system
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更新时间:2024/12/25 13:18:26