“外差激光干涉测量”的概念、定义、翻译、参考文献-科学参考

单词	外差激光干涉测量
释义	外差激光干涉测量 Encyclopedia 工学外差激光干涉测量释 heterodyne laser interferometer外差激光干涉测量干涉光路中测量光和参考光波长（频率）不同，存在一个较小的频差，通过光路设计，使测量光与参考光相互干涉获得干涉信号，其本质是以激光波长作为测量基准，通过监测激光在参考臂、测量臂中光程差、相位差或频差的变化，获得被测目标的位移量或位移相关量。
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