“chemical mechanical polishing slurry”的概念、定义、翻译、参考文献-科学参考

单词	chemical mechanical polishing slurry
释义	chemical mechanical polishing slurry Encyclopedia 工学半导体集成电路用化学品释 chemical mechanical polishing slurry化学机械抛光浆料经过单面或双面化学机械抛光加工的半导体晶片。
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