“chemical mechanical planarization”的概念、定义、翻译、参考文献-科学参考

单词	chemical mechanical planarization
释义	chemical mechanical planarization Encyclopedia 工学平坦化工艺释 chemical mechanical planarization化学机械平坦化在集成电路制造中，通过化学机械抛光方法来抛光基片表面，实现全局平坦化和形成金属互连线图形的技术。是集成电路后道工序的关键工艺。
随便看	zero defect zero deflection zero degree zero degree spectrometer zero-density zero-density hypothesis zero-density method zero-density theorem zero-derivative zero-dimensional zero-dimensional circuit zero-dimensional cycle zero-dimensional-defect zero-dimensionality zero-dimensional manifold zero-dimensional mapping zero-dimensional network solid zero-dimensional set zero-dimensional space zero-dimensional sphere zero-dimensional system zero dimension inorganic nanomaterials zero dimension semiconductor zero-dimension semiconductor zero diopter

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