“chemical mechanical planarization”的概念、定义、翻译、参考文献-科学参考

单词	chemical mechanical planarization
释义	chemical mechanical planarization Encyclopedia 工学平坦化工艺释 chemical mechanical planarization化学机械平坦化在集成电路制造中，通过化学机械抛光方法来抛光基片表面，实现全局平坦化和形成金属互连线图形的技术。是集成电路后道工序的关键工艺。
随便看	detailed balancing detailed balancing principle detailed clustering detailed design detailed design of prefabricated building detailed fatigue analysis method detailed forecast period detailed geochemical survey detailed hydrocarbons detailed model Detailed notes of the Daozang detailed plan detailed planning and design detailed planning of underground space detailed planning organization Detailed Rules for Implementation of Fisheries Law of the People's Republic of China detailed rules for the implementation of the existing banning of building regulations in Guangdong provincial police headquarters Detailed Rules for the Implementation of the Law of the People’s Republic of China on Prevention and Control of Water Pollution detailed search detailed soil survey Detailed Study of Chu Ci detailed survey detail image detail point details of the playwright

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。