“chemical mechanical planarization”的概念、定义、翻译、参考文献-科学参考

单词	chemical mechanical planarization
释义	chemical mechanical planarization Encyclopedia 工学平坦化工艺释 chemical mechanical planarization化学机械平坦化在集成电路制造中，通过化学机械抛光方法来抛光基片表面，实现全局平坦化和形成金属互连线图形的技术。是集成电路后道工序的关键工艺。
随便看	Rhizopus oryzae rhizoremediation Rhizosphere rhizosphere rhizosphere biofilm Rhizosphere effect rhizosphere effect rhizosphere environment rhizosphere microbe rhizosphere microecology of Chinese materia medica rhizosphere microorganisms rhizosphere nutrition of plants rhizosphere talk rhizospheric microorganism rhizostyle RHM R. H. Mellin R. H. Mellin (1854—1933) R. H. Nevanlinna R. H. Nevanlinna (1895—1980) rhodan rhodanese rhodanise Rhode Island red chicken Rhode Island School of Design

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