“chemical mechanical planarization”的概念、定义、翻译、参考文献-科学参考

单词	chemical mechanical planarization
释义	chemical mechanical planarization Encyclopedia 工学平坦化工艺释 chemical mechanical planarization化学机械平坦化在集成电路制造中，通过化学机械抛光方法来抛光基片表面，实现全局平坦化和形成金属互连线图形的技术。是集成电路后道工序的关键工艺。
随便看	management information system of road traffic accident handle management innovation management institution of geoheritage protect management integration management level Management Measures for License of Express Business Management Measures of Public Libraries in Futian District, Shenzhen Management Measures of Public Libraries in Henan Province Management Measures of Public Libraries in Shandong Province Management Measures of Public Libraries in Urumqi Management Measures of Public Libraries in Zhejiang Province Management Methods of Register and Exchange for Athlete（trial） Management Methods of Traditional Sports Events School Management mode of chronic diseases in community management mode of construction project management objective management of acute pain management of amusement equipment management of book distribution management of border affairs management of border production activities management of change Management of chronic disease management of classical gardens management of construction program

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