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chemical mechanical planarization
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chemical mechanical planarization
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工学
平坦化工艺
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chemical mechanical planarization
化学机械平坦化
在集成电路制造中,通过化学机械抛光方法来抛光基片表面,实现全局平坦化和形成金属互连线图形的技术。是集成电路后道工序的关键工艺。
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