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基于掺杂的自停止技术
释义
基于掺杂的自停止技术
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工学
[传感器制造]
释
doping-based etch-stop technology
基于掺杂的自停止技术
硅基传感器在腐蚀工艺过程中,当腐蚀液腐蚀到硅中掺杂的其他元素(如硼、磷)、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时,腐蚀速率出现明显停滞,导致腐蚀自动终止的一种工艺技术。
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forest law
Forest Law of the People's Republic of China
forest lignocellulose
forest line
forest litter
forest management
forest management certification
forest management inventory
forest management organization unit
forest management pattern
forest management period
forest management plan
forest map generalization
forest mapping using remote sensing
forest maturity
forest medicine
forest mensuration
forest meteorological disaster
forest meteorological disasters
forest meteorology
forest microorganism
forest monitoring
forest monument
forest nursery equipment
Forest of Changes
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