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在线波像差检测
释义
在线波像差检测
Encyclopedia
工学
光刻机测量系统
释
on-line aberration
在线波像差检测
基于曝光显影后的图像形状改变、空间像的位置改变,波前相位直接探测原理而进行的波像差测量方法。该测量直接在光刻机上进行,可定义为在线波像差测量系统。
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local people's congresses of the People's Republic of China at various levels
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local point of view
local polarity
local pole
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local polynomial estimation of nonparametric regression model
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local principle
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local procedure call
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local provenance trial
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