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在线波像差检测
释义
在线波像差检测
Encyclopedia
工学
光刻机测量系统
释
on-line aberration
在线波像差检测
基于曝光显影后的图像形状改变、空间像的位置改变,波前相位直接探测原理而进行的波像差测量方法。该测量直接在光刻机上进行,可定义为在线波像差测量系统。
随便看
capillary bundle model
capillary chromatography
capillary column
capillary condensation
capillary constant
capillary depression
capillary effect of textiles
capillary electrochromatography
capillary electrochromatography analysis of pharmaceuticals
capillary electrochromatography (CEC)
capillary electrophoresis
capillary electrophoresis (CE)
capillary electrophoresis-electrochemical detection
capillary electrophoresis-electrochemiluminescence detection
capillary electrophoresis for analysis of pharmaceuticals
capillary electrophoresismass spectrometer
capillary electrophoresismass spectrometer (CE-MS)
capillary electrophoresis-mass spectrometry
capillary electrophoresis- mass spectrometry analysis for pharmaceuticals
capillary electrophoresis sequencer
capillary electrophoresis system
capillary energy
capillary flow
capillary force
capillary gel electrophoresis
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