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反应离子刻蚀
释义
反应离子刻蚀
Encyclopedia
工学
磁致动器
释
reactive ion etching
反应离子刻蚀
将物理性的离子溅射刻蚀和化学性的等离子刻蚀两种方法相结合的物理/化学刻蚀技术。
Physics
凝聚态物理学
结构
reactive ion etching
反应离子刻蚀
Chemistry
>分析化学>仪器分析>释义
reaction ion etching
反应离子刻蚀
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