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双频激光干涉仪计量标准
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双频激光干涉仪计量标准
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measurement standard for heterodyne laser interferometer
双频激光干涉仪计量标准
用于对几何量测量中极为关键且应用普遍的迈克尔逊式激光干涉仪,特别包括高精度双频外差式激光干涉仪性能指标进行准确计量的测量装置。
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