“化学机械平坦化”的概念、定义、翻译、参考文献-科学参考

单词	化学机械平坦化
释义	化学机械平坦化 Encyclopedia 工学平坦化工艺释 chemical mechanical planarization化学机械平坦化在集成电路制造中，通过化学机械抛光方法来抛光基片表面，实现全局平坦化和形成金属互连线图形的技术。是集成电路后道工序的关键工艺。
随便看	geological legend geological logging geological logging technology geological map geological map compilation geological map of ore deposit geological mapping geological mapping based on radioactive data geological mapping in shallow overburden area geological mapping method geological map sheet geological mechanical model experiment geological microbe geological mineral resources map Geological Museum of Geological Survey Institute of Ministry of Agriculture and Commerce Geological Museum of Jingyu Volcanoes and Mineral Springs geological observation point layout geological origin type of fracture geological plan of mining level geological prerequisite of prospecting geological processes geological profile logging geological profile measurement geological radar method geological record

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。