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化学刻蚀
纯粹利用等离子体中的活性原子团(活性自由基,不带电,不受电场的加速作用)与被刻蚀对象发生化学反应,产生挥发性的产物,被真空系统抽离反应室而实现材料去除的技术。
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moving object management
moving observer
moving observer technique
moving part
moving particle semi-implicit method
moving picture expert group
moving picture expert group,MPEG
moving point
moving range
moving range control chart
moving reference system
moving shot
moving sidewalk
moving singularities
moving slit method
moving sofa problem
moving space
moving summation process
moving system
moving target detection
moving target detection of SAR
moving target indication
moving target indication radar
moving teaching system
moving trihedral
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