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剥离工艺
释义
剥离工艺
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工学
光刻技术
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lift-off technology
剥离工艺
集成电路制造中,在光刻环节去除基片上光致抗蚀剂的同时,把胶膜上的薄膜材料一起剥离干净,在基片上只剩下原刻出图形薄膜材料的工艺。
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