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全固态射频发生器
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全固态射频发生器
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理学
火花放电光源
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all solid state frequency conversion generator
全固态射频发生器
提供电感耦合等离子体炬(ICP)放电的能源,能量以射频的形式由炬管同心的感应线圈耦合给等离子体。又称高频发生器。
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更新时间:2025/4/6 10:40:01