“光栅衍射对准测量”的概念、定义、翻译、参考文献-科学参考

单词	光栅衍射对准测量
释义	光栅衍射对准测量 Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	Journal of Library and Information Science Research Journal of Library and Information Studies Journal of Library Science in China Journal of Literature Journal of maize science Journal of Mass Media Ethics Journal of Materials Engineering Journal of Media Economics Journal of Media Ethics Journal of Medicine & Pharmacy of Chinese Minorities Journal of Mining & Safety Engineering Journal of Modern History Journal of Molecular Catalysis B: Enzymatic Journal of Molecular Science Journal of Nanjing Arts Institute(Fine Arts & Design) Journal of Nanjing Arts Institution Fine Art & Design Journal of Nanjing University of Aeronautics & Astronautics Journal of Nanjing University of Traditional Chinese Medicine Journal of National Academy of Chinese Theatre Arts Journal of National Essence Journal of Natural Fibers Journal of Natural Gas Science and Engineering Journal of Navigation and Positioning Journal of Near Eastern Studies Journal of Newspaper Study

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