“光栅衍射对准测量”的概念、定义、翻译、参考文献-科学参考

单词	光栅衍射对准测量
释义	光栅衍射对准测量 Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	Sequel of the Golden-Lotus Sequel of the Journey to the West Sequel of the Nanke Dream Sequel of Water Margin Sequel of Yue Fei's Biographies Collection in Room Jintuo Sequel to A New Account of Tales of the World Sequel to Classified Anthology of Classical Prose Sequel to the Comprehensive Study of Documentary Sources of Great Qing Empire Sequel to the Poem-Related Stories Sequel to the Tastes of Poetry Sequel to What Yijian Heard sequencable group Sequence sequence sequence alignment sequence analysis sequence and ligation independent cloning,SLIC sequence assembly sequence best approximations sequence category sequence complexity sequence control sequence convergent in mean sequence convergent in probability sequence data

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