“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	regional economic growth theory regional economic impact analysis for project regional economic integration Regional Economic Organizations regional economic planning regional economics regional economics model regional economic theory regional economy Regional economy and administration of ethnic minorities regional economy of forestry Regional Electronic Commerce Practice regional engineering geological survey regional environment regional environmental capacity Regional Environmental Function Zoning regional environmental integrated protection planning Regional environmental management regional federation Regional Folk Rites and Ritual Opera regional geochemical exploration regional geographical names system Regional Geography regional geography regional geological map

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。