“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	decision procedure decision process decision psychology decision resource decision rule decision scheme of groundwater management decision situation decisions of administrative litigation Decisions on Speeding up the Reform and Development of Water Conservancy Made by the Central Committee of the Communist Party of China and the State Council decision space decision speed of take-off decision study decision support decision support expert system decision support system decision support system, DSS decision support system for fertilization decision support system of grassland industry decision support system using machine learning, ML-IDSS decision support tools decision surface decision table decision table method decision tables decision theory

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。