“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	passive radar passive radar homing guidance passive radar seeker passive radio frequency identification devices tag passive radio frequency identification devices tag, passive RFID tag passive reference cavity frequency stabilization passive remote sensing passive resistance factors passive review passive RFID tag passive rifting passive rift valley passive risk control passive routing passive safety passive safety system passive satellite passive selective catalytic reduction system for nitrogen oxides passive sensor passive shielding passive sonar passive state passive surveillance passive system passive targeting drug delivery systems

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。