“capacitively coupled microwave plasma source”的概念、定义、翻译、参考文献-科学参考

单词	capacitively coupled microwave plasma source
释义	capacitively coupled microwave plasma source Chemistry ＞分析化学＞仪器分析＞释义 capacitively coupled microwave plasma source (CMP)电容耦合微波等离子体光源
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