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低压化学气相沉积
释义
低压化学气相沉积
Encyclopedia
工学
化学气相沉积
释
low pressure chemical vapour deposition
低压化学气相沉积
反应室的工作压强低于0.1兆帕的化学气相沉积技术。简称LPCVD。
Physics
凝聚态物理学
结构
low pressure chemical vapor deposition, LPCVD
低压化学气相沉积
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Native Title Act 1993
Native Title Amendment Act 1998
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