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亚纳米全频段光学制造
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亚纳米全频段光学制造
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工学
光刻投影物镜
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sub-nanometer precision full frequency optical fabrication
亚纳米全频段光学制造
物镜元件的表面形貌采用功率谱密度表征,其低频、中频与高频分量分别由面形干涉仪、白光干涉仪和原子力显微镜获得的光学制造技术。
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Special Book Awards of China
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Special Committee against Apartheid
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special committees under the National People's Congress
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