“wet anisotropic etching”的概念、定义、翻译、参考文献-科学参考

单词	wet anisotropic etching
释义	wet anisotropic etching Encyclopedia 工学磁致动器释 wet anisotropic etching湿法异向刻蚀某些腐蚀剂对硅不同晶面的腐蚀具有不同的腐蚀速率，基于这种腐蚀特性，可在硅衬底上加工出各种各样的微结构的加工技术。是硅基微机械电子系统应用中一种重要的加工技术。
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