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wavelength scanning interferometry
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wavelength scanning interferometry
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波长扫描干涉测量
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wavelength scanning interferometry
波长扫描干涉测量
以半导体激光器为调频光源,在测量距离保持静止状态时通过连续调制单纵模激光器的激光频率,使得参考激光光波与测量反射激光光波形成相位差发生周期性变化的相干光波,从信号中提取相位信息,并利用相位变化与被测距离之间的关系实现绝对距离测量。
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