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V-groove metal-oxide-semiconductor integrated circuit
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V-groove metal-oxide-semiconductor integrated circuit
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工学
金属-氧化物-半导体集成电路
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V-groove metal-oxide-semiconductor integrated circuit
V型槽金属-氧化物-半导体集成电路
在硅片表面上刻蚀出V型凹槽,并利用双扩散或外延生长等工艺在槽内制作的金属-氧化物-半导体(metal-oxide-semiconductor,MOS)集成电路。简称VMOS电路。
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