“vapour phase epitaxy”的概念、定义、翻译、参考文献-科学参考

单词	vapour phase epitaxy
释义	vapour phase epitaxy Encyclopedia 理学〔半导体材料〕释 vapour phase epitaxy; VPE气相外延一种广义上的生长单晶薄膜材料的工艺方法。 Physics VPE=vapour phase epitaxy汽相外延，汽相取向附生
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