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单词
vapour phase epitaxy
释义
vapour phase epitaxy
Encyclopedia
理学
〔半导体材料〕
释
vapour phase epitaxy; VPE
气相外延
一种广义上的生长单晶薄膜材料的工艺方法。
Physics
VPE=vapour phase epitaxy
汽相外延,汽相取向附生
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