“vapor phase epitaxy”的概念、定义、翻译、参考文献-科学参考

单词	vapor phase epitaxy
释义	vapor phase epitaxy Encyclopedia 工学半导体外延生长释 vapor phase epitaxy气相外延反应物通过气相输运，并在气相中或衬底表面进行化学反应，然后生长出晶体粒子，以薄膜形式在衬底上进行外延的半导体外延生长技术。简称VPE。 Physics 凝聚态物理学结构 vapor phase epitaxy气相外延
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