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vacuum vapor plating
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vacuum vapor plating
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vacuum vapor plating
真空蒸发镀膜
在真空度不低于10-2帕的真空室中,用不同加热方法把要蒸发材料加热到一定温度,使材料中原子或分子的热振动能量超过表面的束缚能,从而使大量分子或原子蒸发或升华,并直接沉积在固体(衬底或基片)表面,凝结形成固态薄膜的方法。
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