“vacuum vapor plating”的概念、定义、翻译、参考文献-科学参考

单词	vacuum vapor plating
释义	vacuum vapor plating Encyclopedia 工学物理气相沉积释 vacuum vapor plating真空蒸发镀膜在真空度不低于10-2帕的真空室中，用不同加热方法把要蒸发材料加热到一定温度，使材料中原子或分子的热振动能量超过表面的束缚能，从而使大量分子或原子蒸发或升华，并直接沉积在固体（衬底或基片）表面，凝结形成固态薄膜的方法。
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