“vacuum evaporation technique”的概念、定义、翻译、参考文献-科学参考

单词	vacuum evaporation technique
释义	vacuum evaporation technique Encyclopedia 工学【半导体工艺技术】释 vacuum evaporation technique真空蒸发工艺将固体材料置于高真空环境中加热，使之升华或蒸发并淀积在特定的衬底上，以获得薄膜的工艺方法。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。