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vacuum evaporation technique
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vacuum evaporation technique
Encyclopedia
工学
【半导体工艺技术】
释
vacuum evaporation technique
真空蒸发工艺
将固体材料置于高真空环境中加热,使之升华或蒸发并淀积在特定的衬底上,以获得薄膜的工艺方法。
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