“vacuum evaporation technique”的概念、定义、翻译、参考文献-科学参考

单词	vacuum evaporation technique
释义	vacuum evaporation technique Encyclopedia 工学【半导体工艺技术】释 vacuum evaporation technique真空蒸发工艺将固体材料置于高真空环境中加热，使之升华或蒸发并淀积在特定的衬底上，以获得薄膜的工艺方法。
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