“ultra-shallow junction ion implantation”的概念、定义、翻译、参考文献-科学参考

单词	ultra-shallow junction ion implantation
释义	ultra-shallow junction ion implantation Encyclopedia 工学〔纳米科学中核技术〕释 ultra-shallow junction ion implantation超浅结离子注入结深在100纳米左右或者低于100纳米的离子注入。
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