“ultra-precision opto-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	ultra-precision opto-mechanical system
释义	ultra-precision opto-mechanical system Encyclopedia 工学光刻投影物镜释 ultra-precision opto-mechanical system超精密光机系统对光学元件进行精确空间定位与高精度面形支撑，同时实现物镜集成阶段的精密装调及使用阶段功能性补偿的光刻投影物镜。
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