“ultra-precision opto-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	ultra-precision opto-mechanical system
释义	ultra-precision opto-mechanical system Encyclopedia 工学光刻投影物镜释 ultra-precision opto-mechanical system超精密光机系统对光学元件进行精确空间定位与高精度面形支撑，同时实现物镜集成阶段的精密装调及使用阶段功能性补偿的光刻投影物镜。
随便看	effective transformation group effective valuation effective value effective value of alternating current effective value, virtual value effective variance effective viscosity effective wavelength effective width effective yield effective Z effectivity effectivization effect leather effectless effect lighting effect marker effect of acceleration effect of agtion on strucyure effect of artistic communication effect of dance effect of displacement injury effect of electrical discrimination effect of evolution effect of forces

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