“ultra-precision opto-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	ultra-precision opto-mechanical system
释义	ultra-precision opto-mechanical system Encyclopedia 工学光刻投影物镜释 ultra-precision opto-mechanical system超精密光机系统对光学元件进行精确空间定位与高精度面形支撑，同时实现物镜集成阶段的精密装调及使用阶段功能性补偿的光刻投影物镜。
随便看	torsion class torsion coefficients torsion-complete torsion constant torsion-curvature form torsion divisor torsion element torsion fiber torsion field torsion form torsion-free torsion free affine connection torsion-free affine connection torsion-free A-module torsion free commutative group torsion-free commutative group torsion-free connection torsion-free group torsion free module torsion-free module torsion-free ring torsion-free semigroup torsion-free subgroup torsion function torsion group

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