ultra-precision cutting of single crystal brittle material assisted with ion implantation
释义
ultra-precision cutting of single crystal brittle material assisted with ion implantation Encyclopedia
工学超精密加工释 ultra-precision cutting of single crystal brittle material assisted with ion implantation离子注入辅助单晶脆性材料超精密切削 利用离子束对单晶材料进行表面改性，以改善工件表层可加工性能的超精密机械加工方法。