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top down methodfor nanofabrication
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top down methodfor nanofabrication
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工学
纳米技术
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top down methodfor nanofabrication
纳米制备自上而下法
将较大尺寸(从微米级到厘米级)的物质通过光刻、切割、研磨、刻蚀和腐蚀等技术制备纳米结构的方法。
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