“thermochemical vapour deposition”的概念、定义、翻译、参考文献-科学参考

单词	thermochemical vapour deposition
释义	thermochemical vapour deposition Encyclopedia 工学化学气相沉积释 thermochemical vapour deposition热化学气相沉积用热能激活所需气体或者气固相之间的反应从而形成一层薄膜的技术。简称热CVD、TCVD。
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