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靶材料
荷能粒子轰击或加热蒸发的目标材料。通常指溅射靶材,通过等离子或电子束轰击靶材,在特定的基面上形成10~10000纳米级薄膜,进而通过后续加工工艺形成导电层、栅极、阻挡层、绝缘层和线路等。
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split algebra
split block design
split brain
split coring method
split detector
split diaphragm
split domain name server
split endomorphism
split epimorphism
split exact sequence
split extension
split extension of algebras
split extension of groups
split field
split film process
split-flow
split-gate
split gate flash memory
split gene
split group
split group extension
split grouting
split-half method
Split Hopkinson bar
Split Hopkinson Pressure Bar blasting test
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