“surface micromachining”的概念、定义、翻译、参考文献-科学参考

单词	surface micromachining
释义	surface micromachining Encyclopedia 工学微纳机电系统释 surface micromachining表面微加工以硅片为基体，通过多层薄膜淀积和图形加工制备三维微机械结构的一种重要的微电子系统加工手段。
随便看	preparation of colloid preparation of materials under high pressure preparation of polysaccharide drug preparation of semiconductor thin films preparation of zirconium tetrachloride preparation process of polymer mother liquor preparation research of peptide drug preparation science of ceramics preparation theorem preparative chromatography preparative gas chromatography preparatory function instruction prepared common monkshood branched root prepared common monkshood mother root prepared dried ginger prepared form prepared piano prepared rehmannia root prepared slices of Chinese medicinals prepare for dispatch again preparing pre pathologic diagnosis processing devices prepayment prepayment system pre-periodic point

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