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supercritical release
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supercritical release
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supercritical release
超临界释放
表面微机械加工中,牺牲层腐蚀时,通过固相直接变为气相或者移动液气结合面(临界点方法),来避免微结构下的溶液干化过程中出现的表面张力,从而防止黏附的一种技术。
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