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silicon piezoresistive sensor
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silicon piezoresistive sensor
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工学
硅压阻传感器
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silicon piezoresistive sensor
硅压阻传感器
利用半导体硅的压阻效应,把力、力矩、压力、加速度等引起的半导体硅的材料变形,转换为相应的电阻变化,从而通过电学量进行检测的传感器。
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