“silicon direct bonding”的概念、定义、翻译、参考文献-科学参考

单词	silicon direct bonding
释义	silicon direct bonding Encyclopedia 工学磁致动器释 silicon direct bonding硅硅键合将两个表面光滑平整的硅片经化学清洗和等离子活化处理后，在室温下通过表面原子之间的范德华力或氢键结合在一起，再经过高温退火处理，使键合界面发生硅-硅成键化学反应，形成强度很大的化学共价键连接，从而使两个硅片键合为一体的技术。
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