“silicon based sensor”的概念、定义、翻译、参考文献-科学参考

单词	silicon based sensor
释义	silicon based sensor Encyclopedia 工学［传感器材料］释 silicon based sensor硅基传感器敏感结构由硅材料制作，或者以硅材料为衬底，在衬底上制作薄膜敏感结构的传感器。又称硅传感器、硅换能器。
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