“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	phenomenological sociology phenomenological theory phenomenological theory of multiferroics phenomenological transport equation phenomenology phenomenology methodology of psychology phenomenology of film Phenomenology of Perception phenomenology of religion Phenomenology of Spirit phenomenon phenomenon and noumenon phenon phenonium ion phenophase forecast phenothaline test phenothiazine phenothiazine antipsychotics phenothrin phenotype phenotype of crop germplasm phenotype screening phenotypic drug discovery phenotypic mixing phenotypic plasticity

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