“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	optimal multiprogramming optimal open-loop control optimal operational scale of grassland livestock industry optimal operation of distributed energy system under off-design condition optimal optical orthogonal code optimal parallel algorithm optimal parameter optimal path optimal path analysis optimal performance of thermodynamic process and cycle optimal planning optimal policy optimal prediction optimal predictive control optimal process optimal program optimal programming optimal programming control optimal quadrature formula optimal regime optimal regulation optimal regulation for reservoir group and gate dam optimal regulator optimal rotation age optimal rule

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