“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	sport epistemology sport essentialism sport ethics sport fishing bait sport fishing contest sport fishing spot sport fishing tackle sport fishing technique sport for all sport governance sport hunting sport injury sport law science sport laws of Republic of Portuguese sport laws of the Russian Federation sport lifestyle sport management Sport Management Branch of China Sports Science Society sport movie sport ontology sport operation evaluation sport philosophy sport psychology sport rehabilitation sport right

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