“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	simultaneous discrimination simultaneous distribution simultaneous eigenfunction simultaneous eigenfunctions simultaneous eigenstate simultaneous engaging/disengaging of rollers simultaneous equation method simultaneous equation model simultaneous equations simultaneous equations model simultaneous estimation simultaneous events simultaneous exploration of coal and uranium simultaneous exploration of oil and potash simultaneous exploration of oil and uranium simultaneous fault simultaneous fermentation simultaneous game simultaneous homogeneous approximation simultaneous inequalities simultaneous inference simultaneous integral equations simultaneous interpreting simultaneous interval estimation simultaneous invariants

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