“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	specialty structure in higher education specialty wet-laid nonwoven special ultrasonic test instrument special unitary cobordism special unitary group special unitary manifold special unitary matrix special valuation special valuation ring special value special variety special vehicles special welfare special woodworking machine tool special word in chemical manufactory special workover special zero special λ-ring speciatioin analysis of organometallic compounds speciation speciation analysis speciation analysis of trace element species Species 2000 species-abundance distribution

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。