“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Zhengzi Opera Troupe of Lufeng City Zhengzitong Zheng Zuoxin Zhenhai Coastal Defence History Museum Zhenhai Dam Zhenhailou and Guangzhou City Wall in the Ming Dynasty Zhenhai Wan Zhenjiang city Zhenjiang Economic and Technological Development Zone Zhenjiang Jinshan Park Zhenjiang Library of Jiangsu Province Zhenjiang new provincial capital construction plan Zhenjiang Shi Zhenjiang Three Mountains Scenic and Historic Area Zhenjiao Mosque Zhenjing Jiedewaer Wan Zhenjing Zhaowei Zhenji Temple Grottoes zhenjiu gefu Zhenjiu Jiayi Jing Zhenkang Xian Zhenke Zhenlai Museum Zhenlai Xian Zhen Lu

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。