“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Alexander Valentinovich Vampilov Alexander Vasilievich Chayanov Alexander Vasilievich Shiryaevets Alexander Vasilyevich Alexandrov Alexander Vasilyevich Chayanov Alexander Vasilyevich Druzhinin Alexander Vasil'yevich Gauk Alexander Vasilyevich Mosolov Alexander Viktorovich Eremenko Alexander von Humboldt Alexander Wendt Alexander-Whitney mapping Alexander Wylie Alexander Yakovlevich Yashin Alexander Zemlinsky Alexander Ⅰ AlexanderⅡ Alexander Ⅲ Alexandra Alexandra Aikhenvald Alexandra family Alexandre Desplat Alexandre de V. Alexandre Dumas fils Alexandre Guiraud

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