“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	concurrent transitions concurrent validity concurring concussion and contusion of brain concussive concyclic concyclic points concyclic quadrics cond=condenser Condemnatory Novel condensability condensable condensance condensate condensated set condensate fraction condensate gas condensate gas gathering and transportation process with high pressure condensate gas reservoir condensate oil condensate oil stabilization process condensate polishing condensate pump condensate recovery condensate reservoir

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