“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	downstream back downstream fish passage facilities downstream processing downstream sequence Down the Mountain downthrust down time Downton Abbey Downtown Pittsburgh downward downward bias downward causality downward compatibility downward concave downward continuation downward control principle downward convex downward cumulation downward deviation downward directed set downward drift stoping with backfill downward lighting downward Lowenheim-Skolem theorem downward L-S theorem downward LS theorem

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