“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	medical emergency for nuclear and radiation accident Medical emergency management medical emergency of nuclear or radiation accident medical emergency rescueof emergency chemical events medical equipment for protection of nuclear,chemical and biological agents Medical equipment management project medical equipment of navy medical errors medical ethic medical ethics medical evaluation for astronaut Medical Examiner Dr. Qin medical expenses of procreation medical exposure medical fiber medical freezing devices medical gas concentrator device medical genetics medical geographic information system medical geographic map medical geography medical heath materials and dressing medical helminth medical HER(high energy ray) device medical HER treatment devices

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。