“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Y-system Y-tilt ytterbium yttrium yttrium-86 (Y-86) yttrium 90 yttrium-90 yttrium aluminium garnet yttrium aluminum garnet laser yttrium-barium-copper oxide superconductor yttrium-barium-copper oxide superconductor, YBCO superconductor yttrium ferrite Yu Yuan Yuan An Yuan and Ming opera wine counters Yuan'an flower-drum opera Yuan'an Flower Drum Opera Troupe Yuan Ang Yuan'an Xian Yuanba Gas Field Yuanbao Qu Yuanbaoshan Qu Yuanbao Zhen Yuanbiequ

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