“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	diffuse radio emission diffuse reflectanceFourier transform infrared spectrometry diffuse reflectanceFourier transform infrared spectrometry (DR-FTIR) diffuse reflecting power diffuse reflection diffuse reflection light diffuse reflection spectrometry diffuse reflection spectrometry (DRS) diffuser filter diffuser of fluid machinery diffuse scattering diffuse sclerosis diffuse screen diffuse series diffuse set diffuse sound field diffuse type natural hydrate diffuse ultraviolet background diffuse X-ray diffuse X-ray background diffuse X-ray emission diffuse γ-ray emission diffusibility diffusing medium diffusing surface

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。