“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	tower server Tower Shadow Garden tower soft yoke single mooring system tower structure tower telescope tower-type filter towing, anchor handling and supply vessel towing conveying towing positioning towing tank towing truck tow layer yoke tow-line system of the CPC Central Committee town Town and Country Planning town and country planning Town and Country Planning Act（1947，UK） town and country water supply project town and village system in China town and village system pattern of county in China Townes Townes, Charles Hard Town Hall of Saynatsalo town house townhouse

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