“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	chemical digestion chemical diversity synthesis chemical doping white light-emitting polymer chemical dosimeter chemical dynamics chemical dynamics of aquatic system chemical ecology chemical effect in nuclear reaction chemical electronic business chemical element chemical embryology chemical endemic disease chemical energy chemical energy storage chemical engineering chemical engineering ceramics Chemical Engineering Design Chemical Engineering Journal chemical engineering liability insurance chemical engineering risk assessment chemical engineering risk control chemical engineering risk identification chemical engineering risk transference Chemical Engineering Science chemical engineering security

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