“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Vallis Snellius Vallée Poussin Vallée-Poussin valnemulin valon Valsalva maneuver VALS Classification System VALS分类系统 Valter brani Sarajevo valuable portion photography of crime scene valuable security valuated valuation valuation group valuation ideal valuation model for preferred stock valuation model of non-fixed growth stock valuation of ecosystem service valuation of rank 1 valuation of rank r valuation progress combination valuation ring valuation technology of non-value factor valuation theory valuation topology

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