“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	TDRSS TDS TD-SCDMA TDT T duality T-duality TDV T dwarf TD近似 TE Te TEA tea tea acrobatics tea affairs Tea and horse policy tea and horse trade tea and horse trade policy tea anthracnose tea aphid tea area in north Yangtze River tea area in south China tea area in southwest China tea area in south Yangtze River tea area with advantage conditions

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