“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	firn basin firn ice firn line Firsov crater FIRST first first adjoint operator first adjoint space first aid for accidents at the construction site first aid medicine for rocket propellant poisoning first antenna First Anthology of Books from Collectanea first appearance datum first approximation first approximation theory first-ascent giant branch first author counting first axiom of countability First Barbary War, Second Barbary War first Bianchi identity First Blood First booming of domestic newspaper first boundary condition first boundary value problem first Brillouin zone

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