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Si(100) patterned substrate
释义
Si(100) patterned substrate
Encyclopedia
工学
硅衬底
释
Si(100) patterned substrate
Si(100)图形衬底
Si(100)平面单晶衬底经图形化及湿法腐蚀之后形成的部分Si(111)面裸露的非平面衬底。
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