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Si(100) patterned substrate
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Si(100) patterned substrate
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工学
硅衬底
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Si(100) patterned substrate
Si(100)图形衬底
Si(100)平面单晶衬底经图形化及湿法腐蚀之后形成的部分Si(111)面裸露的非平面衬底。
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