“separate by implant oxygen”的概念、定义、翻译、参考文献-科学参考

单词	separate by implant oxygen
释义	separate by implant oxygen Encyclopedia 工学区熔法晶体生长释 separate by implant oxygen;SIMOX注入氧隔离制备绝缘体上硅（silicon on insulator，SOI）衬底时所使用的工艺技术。
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