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self-doping effect by epitaxity
释义
self-doping effect by epitaxity
Encyclopedia
工学
半导体外延生长
释
self-doping effect by epitaxity
外延自掺杂效应
在材料的外延生长过程中,衬底/外延层中的杂质由于热蒸发或化学反应的副产物对衬底的腐蚀,使衬底中的杂质进入界面层,改变边界层中的掺杂成分和浓度,从而导致外延层中杂质的实际分布偏离理想状况的现象
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