“self alignment double exposure technology”的概念、定义、翻译、参考文献-科学参考

单词	self alignment double exposure technology
释义	self alignment double exposure technology Encyclopedia 工学光刻技术释 self alignment double exposure technology自对准双重曝光技术集成电路制造中，在光刻环节对光刻胶覆盖的晶片分别进行两次曝光的技术。
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