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selective epitaxy growth
释义
selective epitaxy growth
Encyclopedia
工学
外延生长
释
selective epitaxy growth
选择性外延生长
仅在半导体衬底上由氧化物或氮化物等绝缘介质覆盖开有窗口的区域进行外延生长的半导体薄膜制备技术。
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