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sacrificial layer technology
释义
sacrificial layer technology
Encyclopedia
工学
磁致动器
释
sacrificial layer technology
牺牲层技术
在表面微加工工艺中,为形成微机械结构的空腔或可活动的微结构,先在下层薄膜上沉积所需的结构件,再用化学刻蚀剂将此层薄膜腐蚀掉而不损伤微结构件,得到上层薄膜结构(空腔或微结构件)的加工方法。
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base NP
base number
base of a cone
base of a cylinder
base of a deformation
base of a filter
base of a logarithm
base of a matroid
base of a neighborhood system
base of a number system
base of a power
base of a roulette
base of a topological space
base of a topology
base of a trapezoid
base of a triangle
base of a uniformity
base of a vector bundle
base of a vector space
base of natural logarithms
base oil dewaxing process
base on context information fusion
Base Orcadas Station
base pair
base pair (bp)
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