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sacrificial layer technology
释义
sacrificial layer technology
Encyclopedia
工学
磁致动器
释
sacrificial layer technology
牺牲层技术
在表面微加工工艺中,为形成微机械结构的空腔或可活动的微结构,先在下层薄膜上沉积所需的结构件,再用化学刻蚀剂将此层薄膜腐蚀掉而不损伤微结构件,得到上层薄膜结构(空腔或微结构件)的加工方法。
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single antenna
Single Aperture Far-Infrared Observatory
single-aperture radio telescope
single-arc method
single-arm spectrometer
single asset test
single-atom catalysis
single-atom catalyst
single-atom chemistry
single bar
single baseline processing
single base propellant
singlebeam bathymetric survey system
single-beam direct method
single beam echo sounder
single beam echo sounding
single beam measurement
single-beam method
single-beam polarimeter
single beam sonar sediment survey
single beam spectrophotometer
single binary operation
single birth process
single birth Q matrix
single birth Q-matrix
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更新时间:2026/5/17 4:35:58