“sacrificial layer technology”的概念、定义、翻译、参考文献-科学参考

单词	sacrificial layer technology
释义	sacrificial layer technology Encyclopedia 工学磁致动器释 sacrificial layer technology牺牲层技术在表面微加工工艺中，为形成微机械结构的空腔或可活动的微结构，先在下层薄膜上沉积所需的结构件，再用化学刻蚀剂将此层薄膜腐蚀掉而不损伤微结构件，得到上层薄膜结构（空腔或微结构件）的加工方法。
随便看	impurity atom impurity average impurity band impurity band conduction impurity band conduction detector impurity defect impurity defect; extrinsic defect impurity diffusion impurity diffusion technique impurity effect impurity ensemble impurity in semiconductor impurity inspection of crude drug impurity in the wool fibers impurity level impurity mode impurity photo conductance impurity photo-conductance impurity photoconduction impurity resistivity impurity scattering impurity scattering for carrier impurity segregation impurity semiconductor impurity state

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