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sacrificial layer technology
释义
sacrificial layer technology
Encyclopedia
工学
磁致动器
释
sacrificial layer technology
牺牲层技术
在表面微加工工艺中,为形成微机械结构的空腔或可活动的微结构,先在下层薄膜上沉积所需的结构件,再用化学刻蚀剂将此层薄膜腐蚀掉而不损伤微结构件,得到上层薄膜结构(空腔或微结构件)的加工方法。
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centralized fusion
centralized gas supply system
Centralized ink supply
centralized management by specialized sphere
centralized management model
centralized mode of emergency linkage
centralized network
centralized networked control system
centralized order
centralized payment system of treasury
centralized power supply mode
centralized process
centralized purchasing
centralized refresh
centralized regulation of pipelines
centralized security supervision mode
centralized supervisory control of cascade hydropower stations
centralized supervisory control system of hydropower station
centralized traffic control system
centralized treatment of municipal wastewater
centralized type of organization
centralized water supply
centralize kalman filtering
centralizer
centralizer group
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